IntelLiDrives theta-2-theta stage consists of two rotation stages arranged in such a way that axes of rotation for both the stages are aligned. Either of two stages is independently controlled. Both stages have preloaded ball bearing guides for … [Read more...]
Air bearing planar XY table
Intellidrives Planar XY Table offers the unique capability to operate two axes of motion in one plane with one motor. These systems are designed to replace conventional compounded XY tables where one axis is being carried by another. As a result, … [Read more...]
High frequency linear actuators with cross roller bearing
IntelLiDrives Circular Voice Coil Positioning Stage (ICVCA) is a compact stage ideal for closed loop short stroke positioning applications where precision, repeatability and low force ripple are of utmost importance. ICVCA stages are built with … [Read more...]
Rotary table tackles big wafers
The 335 mm diameter center opening in the ACR-335UT rotary table easily accommodates large 300 mm (12-in.) semiconductor wafers, allowing for extraction of the chip dies from the wafer during semiconductor assembly manufacturing processes or dual … [Read more...]
